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Micro-Nanofabrication and Thin-Film Processing

ECE 549/MSE 549

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This course investigates the technology and underlying science of micro-and nano-fabrication, which are the methods used to build billions of electronic and optoelectronic devices on a chip, as well as general small sensors and actuators generally referred to as micro-electromechanical systems (MEMS). The general approach involves deposition, modification, and patterning of layers less than one-micrometer thick, hence the generic term "thin-film" processing. Topics covered: film deposition and growth via physical and chemical vapor deposition, photolithography, pattern transfer, plasma-processing, ion-implantation, and vacuum science.
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Section L01