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Fundamentals and Applications of Low Temperature Plasmas

CBE 516

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An introductory course on the physics, chemistry and applications of low temperature plasmas. Emphasis is on non-equilibrium plasmas, ranging from low to atmospheric pressure, and generally coupled with chemically reactive neutral species. Applications include semiconductor device and thin film qubit fabrication; plasma for sustainability and pollution control; and biomedical and agricultural applications. Surveys of computer simulations and plasma diagnostics included. The course may be taken by undergraduates with permission of the instructor.
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Section L01